High Power Laser Scanning Mirror
CRYLINK provides various types of high power X/Y scanning mirror, mainly including silicon scanning mirror and quartz scanning mirror, for laser scanning mirror systems above 6Kw. Laser wavelengths include 355nm, 532nm, 1064nm and 10.6μm.
CRYLINK’s laser scanning mirror products have high quality polished substrates, low residual stress in the film layer of the lens after coating, and good surface shape.
Thanks to the special coating technology, it is possible to ensure that the mirror dissipate heat quickly and with little temperature rise at the laser focus during use. The amount of change in the shape of the used surface is very small. The mirror have a high threshold of laser damage, which can meet the requirements of long-term stable use of the scanning mirror.
X/Y Scanning Mirror
Incident Beam Diameter (mm)： 8、10、12、15、20
| Laser Wavelength | Incidence Angle | Substrate Material | Damage Threshold | Reflectance |
| 10.6μm | 37.5° ± 12.5° 45°±12.5° | Si | 500W | HR：R>99.5%@10.6um HR：R>85%@650nm |
| 1064nm | 37.5° ± 12.5° 45°±12.5° | Si、FS | >50J/cm2 | HR：R>99.5%@1064nm HR：R>85%@650nm |
| 532nm | 37.5° ± 12.5° 45°±12.5° | FS | >10J/cm2 | HR：R>99.5%@532nm HR：R>85%@650nm |
| 355nm | 37.5° ± 12.5° 45°±12.5° | FS | >5J/cm2 | HR：R>99.5%@355nm HR：R>85%@650nm |
| Fiber Laser 1030-1090nm | 37.5° ± 12.5° 45°±12.5° | Si、FS | >50J/cm2 | HR：R>99.5%@1030-1090nm HR：R>85%@650nm |
X/Y Scanning Mirror Case
**Company (confidential)
High power 1064nm laser oscillator, laser power requirement >6000W
1）Quality control of mirror polishing
| Polished substrates | Coated Mirror | |
| S1 | S1 | |
| Radius Deviation Power | 0.8 λ | 1 λ |
| Astigmatism Deviation PV | 0.15 λ | 0.25 λ |
| Local Deviation PV | 0.2 λ | 0.35 λ |
| Parallelism | 100″ | 100″ |
| Surface Quality | 20/10 | 40/20 |
| Surface Roughness | <4μm | <4μm |
| Optical Aperture | 100%Polished surface | 97%Coating area |
| Chipping | <0.1 mm | <0.1 mm |
Product Advantages
| Medium Power Use | High Power Use | |
| Average Power | >6000w@1064nm | >8000w@1064nm |
| Power Density | >1000W/cm2 | >2000W/cm2 |
| Damage Threshold | >10J /cm2@1064nm,10ns | >30J /cm2@1064nm,10ns |
- High quality substrate material, rough machining and polishing quality are the main factors affecting the performance of optical elements.
- The mirrors are made of imported Corning 7979 and 7980 materials with guaranteed quality;
- For high-power laser optical elements, it is particularly required that the edge collapse of the substrate should be well controlled, otherwise the mirrors film will crack and extend in the process of use.
- The surface finish and roughness of the substrate will greatly affect the damage threshold of the film.
- The surface shape of substrate will affect the shape of laser spot, so PV and RMS need to be controlled.
| Parallelism | PV | RMS | Fineness | Roughness |
| <0.02mm | <1/8λ | <0.25λ | <20/10 | <0.3nm |
Coating is the core process of the scanning mirror, and the following factors need to be considered:
- Good reflectivity of the lens under different incident angles;
- Under different incident angles, the reflectivity of the probe light is high enough;
- After coating, the deformation of the substrate should be small enough. The stress relief design of the film must be considered;
- Good laser damage threshold;
| Coating Deformation | PV<0.3λ, RMS<0.4 λ |
| Finish after Coating | <20/10 |
| Laser Reflectivity | HR,R>99.8%@1070nm/ HR, R>99.5%@1030-1090nm, AR, R<0.1%@1030-1060 |
| Probe Light Reflection | R>90%@400-700nm |
| Incidence Angle | HR: 37.5±15°,45±15°;AR: 0±10°,45±15° |
